Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation.
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- 作者：Yu H
- 所属单位：数理与信息工程学院
- 文献类型：期刊
- 发表时间：2016-01-01
- 发表刊物：Sensors (Basel)
- 卷号：Vol.16
- 期号：No.5
- 是否译文：否
- 关键字：capacitive;sensor;hybrid-frequency;mono-electrode;planar;position
- 摘要：A new way of measuring planar position for micrometric and sub-micrometric applications is presented with a mono sensing electrode and hybrid-frequency excitation. The sensing theory and operation principle are described and summarized, and a printed circ
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