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Tin catalyzed silicon nanowires prepared by magnetron sputtering

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First Author : Jian Liu

Date of Publication : 2015-01-01

Journal : Materials Letters

Affiliation of Author(s) : 数理与信息工程学院

Document Type : 期刊

Volume : Vol.151

Page Number : 122-125

ISSN : 0167-577X

Key Words : Magnetron;sputtering;Silicon;nanowire;Sn;catalyst;VLS;growth;mechanism

Abstract : Tin (Sn) catalyzed silicon nanowires (Si NWs) were grown by the method of magnetron sputtering at temperatures ranging from 250 to 400 ??C. As the growth temperature increases from 250 to 400 ??C, the length and density of Si NWs first increases and then

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