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First Author : Jian Liu

Affiliation of Author(s): 数理与信息工程学院

Date of Publication : 2015-01-01

Document Type : 期刊

Journal : Materials Letters

Volume: Vol.151

Page Number : 122-125

ISSN : 0167-577X

Translation or Not : no

Key Words : Magnetron;sputtering;Silicon;nanowire;Sn;catalyst;VLS;growth;mechanism

Abstract : Tin (Sn) catalyzed silicon nanowires (Si NWs) were grown by the method of magnetron sputtering at temperatures ranging from 250 to 400 ??C. As the growth temperature increases from 250 to 400 ??C, the length and density of Si NWs first increases and then